Oxford Instruments Plasma Technology

1. Oxford Instruments Plasma Technology

The Business of Science®
Oxford Instruments
Plasma Technology
A Part of Oxford Instruments plc
© Oxford Instruments 2015
CONFIDENTIAL
Page 1

2. About Us

The Business of Science®
Plasma & Ion Beam Etch & Deposition
• One of the world’s leading
manufacturers of configurable process
tools
Providers of leading-edge processes
Precise, controllable and repeatable
etching, deposition and growth of
micro- and nano-structures
© Oxford Instruments 2015
CONFIDENTIAL
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3. About Us

The Business of Science®
• Plasma Technology
• Over 360 employees worldwide
• Established in 1982
• Offices in Europe, Asia & the USA
• ISO 9001:2000,18001& 14001 certified
• Applications include: High Brightness LEDs,
MEMS, 3rd generation photovoltaics, next generation
semiconductor technology
• Oxford Instruments plc
• Established in 1959
• £360.1 million in sales in 2013-14
• Over 1,800 employees worldwide
© Oxford Instruments 2015
CONFIDENTIAL
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4. Our Strategy

The Business of Science®
Partnering with customers and suppliers to:
• Strengthen our position as the
market leader for research tools
• Provide world leading tools and
process solutions to the
production market
© Oxford Instruments 2015
CONFIDENTIAL
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5. Our Primary Markets

The Business of Science®
Semiconductor Electronics
Displays & Lighting
Customer Service
Research
MEMS
© Oxford Instruments 2015
CONFIDENTIAL
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6. Our Products

The Business of Science®
Plasma Etch & Deposition
• Inductively coupled
plasma (ICP) etch and
deposition
Reactive ion etching (RIE)
Switched RIE/PE etch
modes
Plasma-enhanced
chemical vapour
deposition (PECVD)
© Oxford Instruments 2015
CONFIDENTIAL
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7. Our Products

The Business of Science®
Plasma Etch & Deposition
• Open Load or Load Lock
• Single-wafer, batch and
cassette-to-cassette
handling
Up to 300mm wafers
© Oxford Instruments 2015
CONFIDENTIAL
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8. Our Products

The Business of Science®
Atomic Layer Deposition (ALD)
• Thermal and low temperature
Remote Plasma
Open Load or Load Lock
Single-wafer, batch and
cassette-to-cassette handling
Up to 200mm wafer
© Oxford Instruments 2015
CONFIDENTIAL
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9. Our Products

The Business of Science®
Ion Beam Deposition & Etch
• Dedicated etch or
deposition tools
Etch or Deposition in a
single tool
Up to 200mm wafer (300
series)
4 x 250mm substrates
(500 series)
© Oxford Instruments 2015
CONFIDENTIAL
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10. Our Products

The Business of Science®
Ion Beam Deposition & Etch
IBE, RIBE, CAIBE
IBD, RIBD
White light optical monitor
Crystal monitor
SIMS for etch endpoint
© Oxford Instruments 2015
CONFIDENTIAL
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11. Our Products

The Business of Science®
Nanostructure Growth Tools
• Nanotubes, nanowires
and nanoscale thin films
Sample sizes
up to 200mm
Flexible temperature
range up to 1000°C
High speed ramping
and cooling
PECVD capability
© Oxford Instruments 2015
CONFIDENTIAL
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12. Our Processes

The Business of Science®
Etch, Deposition, Growth
Etch
RIE
ICP
DRIE (Bosch & Cryo)
RIE / PE
Ion Beam
Standard etch
High rate, selectivity, low damage
High rate and selectivity (MEMS)
Failure Analysis
High quality
Deposition
PECVD
Standard deposition
ICP CVD
Low temperature, high quality
Nanofab
High temp. PECVD
PE ALD
Specialist deposition
PVD
High rate deposition
Ion Beam
High quality
Growth
Nanofab
© Oxford Instruments 2015
High temp. PECVD
CONFIDENTIAL
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13. Our Processes

The Business of Science®
Over 6,000 Recipes
• We have a process library with over 6,000 recipes backed
by process guarantees for key parameters and repeatability
such as rate and uniformity
• Compound Semi (III-V)
processes
Micro/Nano applications
Si Front-end processes
Si Back-end processes
© Oxford Instruments 2015
CONFIDENTIAL
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14. Quality

The Business of Science®
Quality Vision
• World class quality in all our
products, systems, processes
and services
We continuously monitor and
improve our procedures and
business activities in order to
exceed customer
expectations
© Oxford Instruments 2015
CONFIDENTIAL
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15. Support

The Business of Science®
Global Support
Support
• Our Customer Support
network offers worldwide
service, spares and technical
support
As part of the Oxford
Instruments group, we
have a global sales and
service support network with
offices in the UK, Germany, Japan, China,
Singapore, Taiwan and the USA
© Oxford Instruments 2015
CONFIDENTIAL
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